Jaakko T. Niinistö Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaakko T. Niinistö returned 6 record(s).

Number	Title
1	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
2	MANOS performance dependence on ALD Al₂O₃ oxidation source
3	Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
4	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
5	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6	Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films