Inductively coupled plasma sources from Plasma ALD, LLC.


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Joshua D. Caldwell Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joshua D. Caldwell returned 2 record(s).

NumberTitle
1Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
2Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars