Inductively coupled plasma sources from Plasma ALD, LLC.


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Timo T. Hatanpää Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timo T. Hatanpää returned 4 record(s).

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
2Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
3Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
4Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars