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Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings

Type:
Journal
Info:
Nanomaterials 2017, 7, 193
Date:
2017-07-20
DOI:
http://dx.doi.org/10.3390/nano7070193

Author Information

Name Institution
Aleksandra RadtkeNicolaus Copernicus University in Toruń
Tomasz JędrzejewskiNicolaus Copernicus University in Toruń
Wiesław KozakNicolaus Copernicus University in Toruń
Beata SadowskaUniversity of Lodz
Marzena Więckowska-SzakielUniversity of Lodz
Ewa TalikUniversity of Silesia
Maarit MäkeläUniversity of Helsinki
Markku A. LeskeläUniversity of Helsinki
Piotr PiszczekNicolaus Copernicus University in Toruń

Films

Plasma Ag

Hardware used: Beneq TFS-200
Ag(FOD)(PEt3), Triethylphosphine (6,6,7,7,8,8,8- heptafluoro-2,2- dimethyl-3,5- octanedionate) silver(I)
CAS#: 165461-74-5
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 120C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Physical Electronics PHI 5700 ESCA

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Quanta 3D FEG

Substrates

TiO2

Notes

1110