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Radical Enhanced Atomic Layer Deposition of Titanium Dioxide

Type:
Journal
Info:
Chem. Vap. Deposition 2007, 13, 152-157
Date:
2007-01-10
DOI:
http://dx.doi.org/10.1002/cvde.200606546

Author Information

Name Institution
Antti NiskanenUniversity of Helsinki
Kai ArstilaUniversity of Helsinki
Markku A. LeskeläUniversity of Helsinki
Mikko K. RitalaUniversity of Helsinki

Films

Plasma TiO2

Hardware used: Custom Microwave Plasma
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 50-250C

Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Advance

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker D8 Advance

Characteristic: Refractive Index
Analysis: Reflectometry
Diagnostic: Hitachi U-2000 Spectrophotometer

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: Perkin Elmer Spectrum GX

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: Perkin Elmer Spectrum GX

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Keithley 2400 Source Meter

Characteristic: Capacitance
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: HP 4284A LCR

Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Diagnostic: Alessi C4S Four Point Probe

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Compositional Depth Profiling
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: Hitachi S-4800 Field Emission Scanning Electron Microscope

Characteristic: Photocatalytic Activity
Analysis: Methylene Blue Degradation
Diagnostic: Custom

Characteristic: Wetting Angle
Analysis: Sessile Drop Tests
Diagnostic: KSV Instruments CAM 100

Substrates

Silicon
Glass
Pt
RuO2
Polycarbonate
Polypropene
Wool

Notes

1330