Kai Arstila Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kai Arstila returned 8 record(s).

Number	Title
1	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
2	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
3	Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
4	Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
5	Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
6	Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
7	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
8	The α and γ plasma modes in plasma-enhanced atomic layer deposition with O₂-N₂ capacitive discharges