Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4, CAS# 546-68-9

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 94 record(s).

NumberTitle
1Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
2Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
3Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
4Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
5Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
6In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
7Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
8The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
9Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
10Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
11Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
12Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
13Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
14Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
15Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
16Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
17Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
18Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
19Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
20Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
21Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
22Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
23Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
24Energy-enhanced atomic layer deposition for more process and precursor versatility
25Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
26Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
27Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
28Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
29Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
30Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
31In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
32Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
33Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
34Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
35Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
36Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
37Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
38Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
39Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
40Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
41Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
42Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
43Oxygen migration in TiO2-based higher-k gate stacks
44Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
45A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
46Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
47Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
48Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
49Plasma-enhanced atomic layer deposition of BaTiO3
50Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
51Plasma-enhanced atomic layer deposition of BaTiO3
52Bipolar resistive switching in amorphous titanium oxide thin film
53Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
54Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
55Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
56MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
57In-gap states in titanium dioxide and oxynitride atomic layer deposited films
58Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
59Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
60Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
61Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
62Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
63Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
64Low temperature temporal and spatial atomic layer deposition of TiO2 films
65TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
66Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
67Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
68Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
69Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
70Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
71The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
72Radical Enhanced Atomic Layer Deposition of Metals and Oxides
73The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
74Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
75Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
76Optical and Electrical Properties of AlxTi1-xO Films
77Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
78Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
79Analysis of nitrogen species in titanium oxynitride ALD films
80Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
81Study on the resistive switching time of TiO2 thin films
82Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
83Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
84Flexible Memristive Memory Array on Plastic Substrates
85Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
86Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
87Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
88Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
89Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
90Optical and Electrical Properties of TixSi1-xOy Films
91Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
92In-gap states in titanium dioxide and oxynitride atomic layer deposited films
93High-efficiency embedded transmission grating
94Radical Enhanced Atomic Layer Deposition of Titanium Dioxide