Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4, CAS# 546-68-9

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 94 record(s).

NumberTitle
1Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
2Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
3In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
4Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
5Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
6Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
7Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
8The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
9Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
10Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
11Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
12MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
13Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
14In-gap states in titanium dioxide and oxynitride atomic layer deposited films
15Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
16Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
17Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
18The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
19Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
20Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
21Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
22Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
23Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
24Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
25Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
26Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
27Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
28Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
29Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
30Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
31In-gap states in titanium dioxide and oxynitride atomic layer deposited films
32The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
33Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
34Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
35Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
36Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
37Bipolar resistive switching in amorphous titanium oxide thin film
38Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
39Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
40Oxygen migration in TiO2-based higher-k gate stacks
41Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
42High-efficiency embedded transmission grating
43Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
44Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
45Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
46Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
47Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
48Plasma-enhanced atomic layer deposition of BaTiO3
49Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
50Analysis of nitrogen species in titanium oxynitride ALD films
51Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
52Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
53Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
54Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
55Optical and Electrical Properties of TixSi1-xOy Films
56Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
57Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
58Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
59A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
60Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
61Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
62Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
63Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
64Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
65Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
66Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
67Plasma-enhanced atomic layer deposition of BaTiO3
68Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
69Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
70Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
71Radical Enhanced Atomic Layer Deposition of Metals and Oxides
72Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
73Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
74Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
75Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
76Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
77Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
78Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
79Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
80Optical and Electrical Properties of AlxTi1-xO Films
81Energy-enhanced atomic layer deposition for more process and precursor versatility
82Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
83Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
84Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
85Flexible Memristive Memory Array on Plastic Substrates
86Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
87Low temperature temporal and spatial atomic layer deposition of TiO2 films
88Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
89Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
90TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
91In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
92Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
93Study on the resistive switching time of TiO2 thin films
94Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD