Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4, CAS# 546-68-9

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 94 record(s).

NumberTitle
1In-gap states in titanium dioxide and oxynitride atomic layer deposited films
2Energy-enhanced atomic layer deposition for more process and precursor versatility
3Characteristics of TiO2 Films Prepared by ALD With and Without Plasma
4Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
5High-efficiency embedded transmission grating
6Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
7Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
8Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
9Surface Reaction Mechanisms during Plasma-Assisted Atomic Layer Deposition of Titanium Dioxide
10Optical and Electrical Properties of AlxTi1-xO Films
11Low temperature temporal and spatial atomic layer deposition of TiO2 films
12Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
13Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry
14MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
15Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
16Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
17Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
18Enhancement of the TiO2 Thin-Film Dielectric Constant Through Pretreatment of Ir Substrate
19Thermal and plasma enhanced atomic layer deposition of ultrathin TiO2 on silicon from amide and alkoxide precursors: growth chemistry and photoelectrochemical performance
20Flexible Memristive Memory Array on Plastic Substrates
21Nitrogen-Doping of Bulk and Nanotubular TiO2 Photocatalysts by Plasma-Assisted Atomic Layer Deposition
22Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
23Thermal and plasma enhanced atomic layer deposition of TiO2: Comparison of spectroscopic and electric properties
24Preliminary investigation of high-k materials - TiO2 doped Ta2O5 films by remote plasma ALD
25Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
26Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
27Highly reflective polymeric substrates functionalized utilizing atomic layer deposition
28Chemically conformal deposition of SrTiO3 thin films by Atomic Layer Deposition using conventional metal organic precursors and remote-plasma activated H2O
29A low-temperature-grown TiO2 -based device for the flexible stacked RRAM application
30In situ control of oxygen vacancies in TiO2 by atomic layer deposition for resistive switching devices
31Analysis of titanium species in titanium oxynitride films prepared by plasma enhanced atomic layer deposition
32The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
33TiO2/Al2O3/TiO2 Nanolaminated Thin Films for DRAM Capacitor Deposited by Plasma-Enhanced Atomic Layer Deposition
34Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
35The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
36Plasma enhanced atomic layer batch processing of aluminum doped titanium dioxide
37Analysis of nitrogen species in titanium oxynitride ALD films
38Growth behavior and structural characteristics of TiO2 thin films using (CpN)Ti(NMe2)2 and oxygen remote plasma
39Plasma-enhanced atomic layer deposition of BaTiO3
40Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
41Low-Temperature ALD Growth of SrTiO3 Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
42Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
43Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
44Increment of dielectric properties of SrTiO3 thin films by SrO interlayer on Ru bottom electrodes
45Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings
46Optical and Electrical Properties of TixSi1-xOy Films
47Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
48Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition
49Deposition temperature dependence of titanium oxide thin films grown by remote-plasma atomic layer deposition
50Characterization of AlON-TiON Stacked Insulators For ZnS:Mn Thin Film Electroluminescent Devices
51In situ diagnostics for studying gas-surface reactions during thermal and plasma-assisted atomic layer deposition
52Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
53Conformal Formation of (GeTe2)(1-x)(Sb2Te3)x Layers by Atomic Layer Deposition for Nanoscale Phase Change Memories
54Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
55Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
56Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N2O Gas
57Atomic structure of conducting nanofilaments in TiO2 resistive switching memory
58Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
59Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
60Atomic Layer Deposition and Electrical Properties of SrTiO3 Thin Films Grown Using Sr(C11H19O2)2, Ti(Oi-C3H7)4, and H2O
61Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
62Plasma activation and atomic layer deposition of TiO2 on polypropylene membranes for improved performances of lithium-ion batteries
63Plasma enhanced atomic layer deposition of SrTiO3 thin films with Sr(tmhd)2 and Ti(i-OPr)4
64Radical Enhanced Atomic Layer Deposition of Metals and Oxides
65Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
66Effect of Crystal Structure and Grain Size on Photo-Catalytic Activities of Remote-Plasma Atomic Layer Deposited Titanium Oxide Thin Film
67Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
68Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
69Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
70Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2
71Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
72Enhanced Dielectric Properties of SrTiO3 Films with a SrRuO3 Seed by Plasma-Enhanced Atomic Layer Deposition
73Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
74Plasma enhanced atomic layer deposition of a (nitrogen doped) Ti phosphate coating for improved energy storage in Li-ion batteries
75The Formation of an Almost Full Atomic Monolayer via Surface Modification by N2O-Plasma in Atomic Layer Deposition of ZrO2 Thin Films
76Effect of Al2O3 insertion on the electrical properties of SrTiO3 thin films: A comparison between Al2O3-doped SrTiO3 and SrTiO3/Al2O3/SrTiO3 sandwich structure
77Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
78Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
79Plasma-Enhanced Atomic Layer Deposition of TiO2 and Al-Doped TiO2 Films Using N2O and O2 Reactants
80Plasma Modeling of a PEALD System for the Deposition of TiO2 and HfO2
81Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
82Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
83Growth Kinetics and Crystallization Behavior of TiO2 Films Prepared by Plasma Enhanced Atomic Layer Deposition
84Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
85Plasma-enhanced atomic layer deposition of titanium phosphate as an electrode for lithium-ion batteries
86Atomic Layer Deposited Electron Transport Layers in Efficient Organometallic Halide Perovskite Devices
87Bipolar resistive switching in amorphous titanium oxide thin film
88Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
89Characteristics of AlxTi1-xOy Films Grown by Plasma-Enhanced Atomic Layer Deposition
90Study on the resistive switching time of TiO2 thin films
91Atomic layer deposition for perovskite solar cells: research status, opportunities and challenges
92Oxygen migration in TiO2-based higher-k gate stacks
93In-gap states in titanium dioxide and oxynitride atomic layer deposited films
94Plasma-enhanced atomic layer deposition of BaTiO3