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Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides

Type:
Journal
Info:
Journal of The Electrochemical Society, 158 (4) G88-G91 (2011)
Date:
2010-11-30
DOI:
http://dx.doi.org/10.1149/1.3552663

Author Information

Name Institution
H. B. ProfijtEindhoven University of Technology
P. KudlacekEindhoven University of Technology
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Plasma Plasma Study

Hardware used: Oxford Instruments FlexAL
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma Plasma Study

Hardware used: Oxford Instruments OpAL
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma Plasma Study

Hardware used: Custom Remote Inductively Coupled Plasma
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma Al2O3

Hardware used: Oxford Instruments FlexAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma HfO2

Hardware used: Oxford Instruments FlexAL
TEMAHf, tetrakis(ethylmethylamido) Hafnium, hafnium ethylmethylamide, (EtMeN)4Hf
CAS#: 352535-01-4
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma TiO2

Hardware used: Oxford Instruments FlexAL
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Plasma Ta2O5

Hardware used: Oxford Instruments FlexAL
PDMAT, (NMe2)5Ta, Pentakis (DiMethylAmido) Tantalum
CAS#: 19824-59-0
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Ion Energy
Analysis: RFEA, Retarding Field Energy Analyzer
Diagnostic: Impedans Semion

Characteristic: Ion Flux
Analysis: Custom
Diagnostic: Custom

Characteristic: Electron Temperature, Te
Analysis: Langmuir Probe
Diagnostic: Custom

Characteristic: Electron Density, ne
Analysis: Langmuir Probe
Diagnostic: Custom

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: Ocean Optics USB 2000

Characteristic: Plasma Species
Analysis: OES, Optical Emission Spectroscopy
Diagnostic: McPherson 234/302 monochrometer

Characteristic: Minority Carrier Lifetime
Analysis: Photoconductance
Diagnostic: Sinton WCT-100

Substrates

Silicon

Notes

Paper available as chapter 5 in on-line thesis.
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