H. B. Profijt Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. B. Profijt returned 6 record(s).

Number	Title
1	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
2	Room-Temperature ALD of Metal Oxide Thin Films by Energy-Enhanced ALD
3	The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides
4	Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
5	Substrate Biasing during Plasma-Assisted ALD for Crystalline Phase-Control of TiO2 Thin Films
6	Substrate-biasing during plasma-assisted atomic layer deposition to tailor metal-oxide thin film growth