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Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3

Type:
Journal
Info:
Electrochemical and Solid-State Letters, 14 (1) H1-H4 (2011)
Date:
2010-09-15
DOI:
http://dx.doi.org/10.1149/1.3501970

Author Information

Name Institution
Gijs DingemansEindhoven University of Technology
N. M. TerlindenEindhoven University of Technology
D. PierreuxASM Microchemistry Oy
H. B. ProfijtEindhoven University of Technology
Mauritius C. M. (Richard) van de SandenEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology

Films

Thermal Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 200C

Thermal Al2O3

Hardware used: ASM EmerALD
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O3, Ozone
CAS#: 10028-15-6
Deposition Temperature Range = 150-200C

Plasma Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: -

Characteristic: Surface Recombination Velocity
Analysis: Photoconductance
Diagnostic: Sinton WCT-100

Characteristic: Passivation
Analysis: SHG, Second Harmonic Generation
Diagnostic: -

Characteristic: Fixed Charge
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: -

Characteristic: Interface State Density
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: -

Characteristic: Density
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Substrates

Silicon

Notes

Paper available as chapter 5 in on-line thesis.
Paper says Oxford Instruments and ASM ALD tools. OpAL and EmerALD are guesses.
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