N. M. Terlinden Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by N. M. Terlinden returned 3 record(s).

Number	Title
1	Controlling the fixed charge and passivation properties of Si(100)/Al₂O₃ interfaces using ultrathin SiO₂ interlayers synthesized by atomic layer deposition
2	Role of field-effect on c-Si surface passivation by ultrathin (2-20 nm) atomic layer deposited Al₂O₃
3	Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al₂O₃