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D. Pierreux Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by D. Pierreux returned 2 record(s).

NumberTitle
1Influence of the Oxidant on the Chemical and Field-Effect Passivation of Si by ALD Al2O3
2Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties