Plasma Study Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Plasma Study films returned 4 record(s).

Number	Title
1	Plasma-enhanced atomic layer deposition: Correlating O₂ plasma parameters and species to blister formation and conformal film growth
2	Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
3	Development and characterization of an atmospheric pressure plasma reactor compatible with spatial ALD
4	Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides