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Ta2O5 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ta2O5 films returned 28 record(s).

NumberTitle
1Low Temperature Plasma-Enhanced Atomic Layer Deposition of Metal Oxide Thin Films
2Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance
3Nanochemistry, nanostructure, and electrical properties of Ta2O5 film deposited by atomic layer deposition and plasma-enhanced atomic layer deposition
4Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
5Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes
6Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
7Comparative study on chemical stability of dielectric oxide films under HF wet and vapor etching for radiofrequency microelectromechanical system application
8Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
9Highly Uniform, Electroforming-Free, and Self-Rectifying Resistive Memory in the Pt/Ta2O5/HfO2-x/TiN Structure
10Comparative Studies of Atomic Layer Deposition and Plasma-Enhanced Atomic Layer Deposition Ta2O5 and the Effects on Electrical Properties of In situ Nitridation
11Selective deposition of Ta2O5 by adding plasma etching super-cycles in plasma enhanced atomic layer deposition steps
12Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
13Atomic layer deposition of Ta-based thin films: Reactions of alkylamide precursor with various reactants
14Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
15Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
16Dielectric properties investigation of a compound based on atomic layer deposited multi-layer structure
17Topographical selective deposition: A comparison between plasma-enhanced atomic layer deposition/sputtering and plasma-enhanced atomic layer deposition/quasi-atomic layer etching approaches
18Thermal and plasma enhanced atomic layer deposition ruthenium and electrical characterization as a metal electrode
19Development of a multianalyte optical sol-gel biosensor for medical diagnostic
20Thermal and Plasma-Enhanced ALD of Ta and Ti Oxide Thin Films from Alkylamide Precursors
21Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)2 Precursor and Oxygen Gas
22Plasma-assisted atomic layer deposition of Ta2O5 from alkylamide precursor and remote O2 plasma
23Topographically selective deposition
24Increment of the Dielectric Constant of Ta2O5 Thin Films by Retarding Interface Oxide Growth on Si Substrates
25Pt/Ta2O5/HfO2-x/Ti Resistive Switching Memory Competing with Multilevel NAND Flash
26In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
27Trilayer Tunnel Selectors for Memristor Memory Cells
28Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study