Inductively coupled plasma sources from Plasma ALD, LLC.


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P. Kudlacek Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. Kudlacek returned 3 record(s).

NumberTitle
1In situ reaction mechanism studies of plasma-assisted atomic layer deposition of Al2O3
2Ion and Photon Surface Interaction during Remote Plasma ALD of Metal Oxides
3The Influence of Ions and Photons during Plasma-Assisted ALD of Metal Oxides