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Antireflection Coating on PMMA Substrates by Atomic Layer Deposition

Type:
Journal
Info:
Coatings 2020, 10, 64
Date:
2020-01-07
DOI:
http://dx.doi.org/10.3390/coatings10010064

Author Information

Name Institution
Pallabi PaulFriedrich-Schiller-Universität Jena
Kristin PfeifferFraunhofer Institute for Applied Optics and Precision Engineering
Adriana SzeghalmiFriedrich-Schiller-Universität Jena

Films

Plasma Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 60C

Thermal Al2O3

Hardware used: Oxford Instruments OpAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature = 60C

Plasma TiO2

Hardware used: Oxford Instruments OpAL
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 60C

Plasma SiO2

Hardware used: Oxford Instruments OpAL
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane
CAS#: 15112-89-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 60C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: Reflectivity
Analysis: Optical Reflectivity
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Characteristic: Transmittance
Analysis: Optical Transmission
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Characteristic: Reflectivity
Analysis: Optical Reflectivity
Diagnostic: Olympus K. K. USPM-RU-W NIR Micro-Spectrophotometer

Characteristic: Adhesion
Analysis: Tape Test
Diagnostic: 3M 853 Polyester Film Tape

Characteristic: Environmental Testing
Analysis: Environmental Testing
Diagnostic: Binder GmbH

Substrates

PMMA, poly(methyl methacrylate)

Notes

1432