Adriana Szeghalmi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriana Szeghalmi returned 13 record(s).

Number	Title
1	Composite materials and nanoporous thin layers made by atomic layer deposition
2	Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
3	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO₂ as low-refractive index material
4	Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
5	Controlling mechanical, structural, and optical properties of Al₂O₃ thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
6	Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
7	High-Reflective Coatings For Ground and Space Based Applications
8	Nanoporous SiO₂ thin films made by atomic layer deposition and atomic etching
9	Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
10	High-efficiency embedded transmission grating
11	Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
12	Comparative study of ALD SiO₂ thin films for optical applications
13	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications