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Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing

Type:
Journal
Info:
Proc. SPIE 10691, Advances in Optical Thin Films VI, 106910E (5 June 2018)
Date:
2018-06-05
DOI:
http://dx.doi.org/10.1117/12.2312516

Author Information

Name Institution
Vivek BeladiyaFriedrich-Schiller-Universität Jena
Tahsin FarazEindhoven University of Technology
Erwin (W.M.M.) KesselsEindhoven University of Technology
Andreas TünnermannFriedrich-Schiller-Universität Jena
Adriana SzeghalmiFriedrich-Schiller-Universität Jena

Films

Plasma Al2O3

Hardware used: Oxford Instruments FlexAL
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 200C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000D

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000D

Characteristic: Transmittance
Analysis: Spectrophotometry
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Characteristic: Reflectance Spectra
Analysis: Spectrophotometry
Diagnostic: PerkinElmer lambda 950 Spectrophotometer

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Specs EA200

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: Bruker-Axs D8 Advance diffractometer/reflectometer

Characteristic: Chemical Composition, Impurities
Analysis: FTIR, Fourier Transform InfraRed spectroscopy
Diagnostic: Varian 3100 FTIR

Characteristic: Stress
Analysis: Wafer Curvature
Diagnostic: KLA-Tencor FLX 2320

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension 3100

Characteristic: Etch Rate
Analysis: Custom
Diagnostic: Custom

Substrates

SiO2
Glass, BK7

Notes

1274