Andreas Tünnermann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andreas Tünnermann returned 10 record(s).

Number	Title
1	Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2	Nanoporous SiO₂ thin films made by atomic layer deposition and atomic etching
3	Comparative study of ALD SiO₂ thin films for optical applications
4	Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
5	Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
6	Composite materials and nanoporous thin layers made by atomic layer deposition
7	High-efficiency embedded transmission grating
8	Controlling mechanical, structural, and optical properties of Al₂O₃ thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
9	Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
10	Plasma-enhanced atomic layer deposition for antireflection coatings using SiO₂ as low-refractive index material