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Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Type:
Journal
Info:
Adv. Optical Mater. 2016, 4, 1780--1786
Date:
2016-06-08
DOI:
http://dx.doi.org/10.1002/adom.201600250

Author Information

Name Institution
Thomas SiefkeFriedrich-Schiller-Universität Jena
Stefanie KrokerTechnische Universität Braunschweig
Kristin PfeifferFriedrich-Schiller-Universität Jena
Oliver PuffkyFriedrich-Schiller-Universität Jena
Kay DietrichFriedrich-Schiller-Universität Jena
Daniel FrantaMasaryk University
Ivan OhlídalMasaryk University
Adriana SzeghalmiFriedrich-Schiller-Universität Jena
Ernst-Bernhard KleyFriedrich-Schiller-Universität Jena
Andreas TünnermannFriedrich-Schiller-Universität Jena

Films

Plasma TiO2

Hardware used: Oxford Instruments OpAL
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Refractive Index
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon UVISEL

Characteristic: Transmittance
Analysis: Optical Transmission
Diagnostic: McPherson VUVaS 2000

Characteristic: Reflectivity
Analysis: Optical Reflectivity
Diagnostic: McPherson VUVaS 2000

Substrates

SiO2

Notes

877