Ernst-Bernhard Kley Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ernst-Bernhard Kley returned 5 record(s).

Number	Title
1	Nanoporous SiO₂ thin films made by atomic layer deposition and atomic etching
2	Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
3	Composite materials and nanoporous thin layers made by atomic layer deposition
4	High-efficiency embedded transmission grating
5	Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS