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Plasma-enhanced atomic layer deposition of BaTiO3

Type:
Journal
Info:
Scripta Materialia, Volume 111, Pages 106 - 109
Date:
2015-08-23
DOI:
http://dx.doi.org/10.1016/j.scriptamat.2015.08.026

Author Information

Name Institution
Peter SchindlerStanford University
Youngjun KimStanford University
Dickson ThianStanford University
Jihwan AnStanford University
Fritz B. PrinzStanford University

Films

Plasma BaTiO3

Hardware used: Oxford Instruments FlexAL
Bis(triisopropyl cyclopentadienyl) barium, Ba(iPr3Cp)2
CAS#: 147658-83-1
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-350C

Plasma BaO

Hardware used: Oxford Instruments FlexAL
Bis(triisopropyl cyclopentadienyl) barium, Ba(iPr3Cp)2
CAS#: 147658-83-1
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-350C

Plasma TiO2

Hardware used: Oxford Instruments FlexAL
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 200-350C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: PHI VersaProbe 5000

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: JEOL JSPM-5200

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan ETEM

Characteristic: EOT, Equivalent Oxide Thickness
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent E4980A Precision LCR Meter

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements
Diagnostic: Keithley 2636A Source Meter

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Morphology, Roughness, Topography
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-2000

Characteristic: EOT, Equivalent Oxide Thickness
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Agilent E4980A Precision LCR Meter

Substrates

Silicon

Notes

517