Fritz B. Prinz Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fritz B. Prinz returned 13 record(s).

Number	Title
1	Enhanced Step Coverage of TiO2 Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
2	Approaching the limits of dielectric breakdown for SiO2 films deposited by plasma-enhanced atomic layer deposition
3	Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
4	High Energy Density Capacitor By Plasma-Treated ALD BaTiO3 Thin Films
5	Plasma-enhanced atomic layer deposition of tungsten nitride
6	Plasma-enhanced atomic layer deposition of BaTiO3
7	Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
8	Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
9	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
10	Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
11	Plasma-enhanced atomic layer deposition of superconducting niobium nitride
12	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
13	Thermal conductivity of ultrathin BaTiO3 films grown by plasma-assisted atomic layer deposition