Peter Schindler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter Schindler returned 7 record(s).

Number	Title
1	Atomic layer deposition by reaction of molecular oxygen with tetrakisdimethylamido-metal precursors
2	Plasma-enhanced atomic layer deposition of BaTiO₃
3	Plasma-Enhanced Atomic Layer Deposition of SiN-AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
4	Plasma-enhanced atomic layer deposition of barium titanate with aluminum incorporation
5	Correlation of film density and wet etch rate in hydrofluoric acid of plasma enhanced atomic layer deposited silicon nitride
6	Enhanced Step Coverage of TiO₂ Deposited on High Aspect Ratio Surfaces by Plasma-Enhanced Atomic Layer Deposition
7	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition