Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment

Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-12-08

Author Information

Name Institution
Alexander SasinskaUniversity of Cologne
Trilok SinghUniversity of Cologne
Shuangzhou WangUniversity of Cologne
Sanjay MathurUniversity of Cologne
Ralph KraehnertTechnische Universität Berlin

Films

Thermal TiO2


Other TiO2

Hardware used: Beneq TFS-200


CAS#: 7732-18-5

CAS#: 1333-74-0

Film/Plasma Properties

Characteristic: Photoelectrochemical (PEC) Activity
Analysis: Linear Sweep Voltammetry

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Photocurrent
Analysis: Photocurrent Measurements

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Resistivity, Sheet Resistance
Analysis: Two-point Probe

Characteristic: Unknown
Analysis: Raman Spectroscopy

Characteristic: Optical Bandgap
Analysis: -

Substrates

FTO, F:SnO2

Notes

Impact of H2 plasma treatment of Beneq TFS 200 thermal ALD TiO2 for photoelectrochemical water splitting.
Beneq TFS-200 used for thermal ALD of TiO2. H2 plasma exposure done on different, unspecified hardware.
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