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Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO3 Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
Journal of The Electrochemical Society, 155(10) G185-G188 (2008)
Date:
2008-08-01
DOI:
http://dx.doi.org/10.1149/1.2960898

Author Information

Name Institution
Ji-Hoon AhnKorea Advanced Institute of Science and Technology
Sang-Won KangKorea Advanced Institute of Science and Technology
Ja-Yong KimHynix Semiconductor
Jin-Hyock KimHynix Semiconductor
Jae-Sung RohHynix Semiconductor

Films

Plasma SrTiO3

Hardware used: Custom
Sr(DPM)2, Strontium(II) bis(2,2,6,6-tetramethyl-3,5-heptanedionate)
CAS#: 36830-74-7
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Gaertner L116C

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Rigaku

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Characteristic: Dielectric Constant, Permittivity
Analysis: C-V, Capacitance-Voltage Measurements
Diagnostic: Keithley 590 CV Analyzer

Substrates

SrRuO
Ru

Notes

Sr(DPM)2 was dissolved in butyl acetate and supplied via liquid delivery.
600C RTA in N2 for 10min.
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