Jae-Sung Roh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jae-Sung Roh returned 6 record(s).

Number	Title
1	Low-Temperature ALD Growth of SrTiO₃ Thin Films from Sr beta-Diketonates and Ti Alkoxide Precursors Using Oxygen Remote Plasma as an Oxidation Source
2	Effect of Sr-Ruthenate Seed Layer on Dielectric Properties of SrTiO₃ Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
3	Influence of oxidant source on the property of atomic layer deposited Al₂O₃ on hydrogen-terminated Si substrate
4	Increment of dielectric properties of SrTiO₃ thin films by SrO interlayer on Ru bottom electrodes
5	Enhanced Dielectric Properties of SrTiO₃ Films with a SrRuO₃ Seed by Plasma-Enhanced Atomic Layer Deposition
6	Interfacial Layer Properties of HfO₂ Films Formed by Plasma-Enhanced Atomic Layer Deposition on Silicon