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Flexible Memristive Memory Array on Plastic Substrates

Type:
Journal
Info:
Nano Lett., 2011, 11 (12), pp 5438-5442
Date:
2011-10-23
DOI:
http://dx.doi.org/10.1021/nl203206h

Author Information

Name Institution
Seungjun KimKorea Advanced Institute of Science and Technology
Hu Young JeongKorea Advanced Institute of Science and Technology
Sung Kyu KimKorea Advanced Institute of Science and Technology
Sung-Yool ChoiElectronics and Telecommunication Research Institute, (ETRI)
Keon Jae LeeKorea Advanced Institute of Science and Technology

Films

Plasma TiO2

Hardware used: ASM Genitech PEALD
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 100C

Film/Plasma Properties

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: -

Characteristic: Resistive Switching
Analysis: I-V, Current-Voltage Measurements
Diagnostic: -

Substrates

Polyimide

Notes

1013