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Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering

Type:
Journal
Info:
Micromachines 2020, 11, 1128
Date:
2020-12-15
DOI:
http://dx.doi.org/10.3390/mi11121128

Author Information

Name Institution
Armin BarthelUniversity of Cambridge
Joseph W. RobertsUniversity of Liverpool
Mari NapariUniversity of Cambridge
Martin FrentrupUniversity of Cambridge
Tahmida N. HuqUniversity of Cambridge
András KovácsPeter-Grünberg Institute
Rachel A. OliverUniversity of Cambridge
Paul R. ChalkerUniversity of Liverpool
Timo SajavaaraUniversity of Jyväskylä
Fabien C-P. MassabuauUniversity of Cambridge

Films

Plasma Ga2O3

Hardware used: Oxford Instruments OpAL
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Plasma GaTiOx

Hardware used: Oxford Instruments OpAL
TEG, triethyl galium, GaEt3
CAS#: 1115-99-7
TTIP, titanium(IV) isopropoxide, Ti(O-i-Pr)4
CAS#: 546-68-9
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: Horiba Jobin Yvon

Characteristic: Chemical Composition, Impurities
Analysis: RBS, Rutherford Backscattering Spectrometry
Diagnostic: -

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Empyrean

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: FEI Titan

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Dimension Edge

Characteristic: Band Gap
Analysis: UV-VIS Spectroscopy
Diagnostic: Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS)

Characteristic: Transmittance
Analysis: UV-VIS Spectroscopy
Diagnostic: Agilent Cary 7000 Universal Measurement Spectrophotometer (UMS)

Substrates

Sapphire

Notes

1676