Rachel A. Oliver Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Rachel A. Oliver returned 3 record(s).

Number	Title
1	α-Ga₂O₃ grown by low temperature atomic layer deposition on sapphire
2	Ti Alloyed α-Ga₂O₃: Route towards Wide Band Gap Engineering
3	Low temperature growth and optical properties of α-Ga₂O₃ deposited on sapphire by plasma enhanced atomic layer deposition