Inductively coupled plasma sources from Plasma ALD, LLC.


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Armin Barthel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Armin Barthel returned 2 record(s).

NumberTitle
1Antiferromagnetism and p-type conductivity of nonstoichiometric nickel oxide thin films
2Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering