Joseph W. Roberts Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Joseph W. Roberts returned 6 record(s).

Number	Title
1	Atomic Layer Deposition of Niobium Nitride from Different Precursors
2	Redshift and amplitude increase in the dielectric function of corundum-like α-(Ti_xGa_1-x)₂O₃
3	A study of the impact of in-situ argon plasma treatment before atomic layer deposition of Al₂O₃ on GaN based metal oxide semiconductor capacitor
4	Low temperature growth and optical properties of α-Ga₂O₃ deposited on sapphire by plasma enhanced atomic layer deposition
5	Ti Alloyed α-Ga₂O₃: Route towards Wide Band Gap Engineering
6	α-Ga₂O₃ grown by low temperature atomic layer deposition on sapphire