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Ga2O3 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Ga2O3 films returned 28 record(s).

NumberTitle
1Electrical characteristics of Ga2O3-TiO2 nanomixed films grown by plasma-enhanced atomic-layer deposition for gate dielectric applications
2Low Thermal Budget Heteroepitaxial Gallium Oxide Thin Films Enabled by Atomic Layer Deposition
3Metal-insulator-semiconductor structure using Ga2O3 layer by plasma enhanced atomic layer deposition
4Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
5Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
6Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
7Room Temperature Atomic Layer Deposition of Gallium Oxide Investigated by IR Absorption Spectroscopy
8Effect of postdeposition annealing on the electrical properties of beta-Ga2O3 thin films grown on p-Si by plasma-enhanced atomic layer deposition
9Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxy
10Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
11Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
12Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
13RT Ga2O3 atomic layer deposition by using trimethylgallium and water-oxygen plasma
14Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
15Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment
16Low temperature deposition of Ga2O3 thin films using trimethylgallium and oxygen plasma
17Plasma enhanced atomic layer deposition of Ga2O3 thin films
18Annealing effects on properties of Ga2O3 films deposited by plasma-enhanced atomic layer deposition
19Fundamental reaction of RT gallium oxide atomic layer deposition investigated by IR absorption spectroscopy
20Phase Control of Crystalline Ga2O3 Films by Plasma-Enhanced Atomic Layer Deposition
21α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
22Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
23Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
24Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
25Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering
26Atomic layer deposition of high purity Ga2O3 films using liquid pentamethylcyclopentadienyl gallium and combinations of H2O and O2 plasma
27Atomic Layer Deposition of Gallium Oxide Films as Gate Dielectrics in AlGaN/GaN Metal-Oxide-Semiconductor High-Electron-Mobility Transistors