GaTiO_x Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GaTiO_x films returned 3 record(s).

Number	Title
1	Electrical properties of Ga₂O₃-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)
2	Ti Alloyed α-Ga₂O₃: Route towards Wide Band Gap Engineering
3	Redshift and amplitude increase in the dielectric function of corundum-like α-(Ti_xGa_1-x)₂O₃

GaTiOx Plasma Enhanced Atomic Layer Deposition Film Publications