Fabien C-P. Massabuau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien C-P. Massabuau returned 4 record(s).

Number	Title
1	α-Ga2O3 grown by low temperature atomic layer deposition on sapphire
2	Redshift and amplitude increase in the dielectric function of corundum-like α-(TixGa1-x)2O3
3	Low temperature growth and optical properties of α-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition
4	Ti Alloyed α-Ga2O3: Route towards Wide Band Gap Engineering