Fabien C-P. Massabuau Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Fabien C-P. Massabuau returned 4 record(s).

Number	Title
1	Redshift and amplitude increase in the dielectric function of corundum-like α-(Ti_xGa_1-x)₂O₃
2	α-Ga₂O₃ grown by low temperature atomic layer deposition on sapphire
3	Low temperature growth and optical properties of α-Ga₂O₃ deposited on sapphire by plasma enhanced atomic layer deposition
4	Ti Alloyed α-Ga₂O₃: Route towards Wide Band Gap Engineering