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Half-wave phase retarder working in transmission around 630nm realized by atomic layer deposition of sub-wavelength gratings

Type:
Journal
Info:
OPTICAL MATERIALS EXPRESS, Vol. 5, No. 1, 1 Jan 2015.
Date:
2014-12-05

Author Information

Name Institution
Thomas PaulFraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2

Hardware used: Unknown


CAS#: 7782-44-7

Film/Plasma Properties

Substrates

Notes

212