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Custom Microwave Plasma Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Custom Microwave Plasma hardware returned 19 records.

Number	Title
1	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2	Gallium nitride thin films by microwave plasma-assisted ALD
3	Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber
4	Characteristics of Hf-silicate thin films synthesized by plasma enhanced atomic layer deposition
5	Synthesis and Characterization of BiFeO₃ Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
6	Atomic layer deposition of YMnO₃ thin films
7	Spontaneous formation of aluminum germanate on Ge(100) by atomic layer deposition with trimethylaluminum and microwave-generated atomic oxygen
8	Nanostructure and temperature-dependent photoluminescence of Er-doped Y₂O₃ thin films for micro-optoelectronic integrated circuits
9	Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
10	Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
11	Surface reaction kinetics of metal β-diketonate precursors with O radicals in radical-enhanced atomic layer deposition of metal oxides
12	Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
13	Role of low-energy ion irradiation in the formation of an aluminum germanate layer on a germanium substrate by radical-enhanced atomic layer deposition
14	Atomic layer epitaxy of gallium arsenide with the use of atomic hydrogen
15	Formation of Al₂O₃ Film on Si Substrate by Microwave Generated Remote Plasma Assisted Atomic Layer Deposition Technique
16	A Microwave Driven PE-ALD for Ultrathin Al₂O₃/ZnO Synthesis over Perovskite Layer
17	Magnetic Properties of CoFe₂O₄ Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition
18	Plasma enhanced atomic layer deposition of thin film Li_1+xMn_2-xO₄ for realization of all solid-state 3D lithium-ion microbatteries
19	Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds