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Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries

Type:
Journal
Info:
Journal of Vacuum Science & Technology A 39, 012408 (2021)
Date:
2020-11-23
DOI:
http://dx.doi.org/10.1116/6.0000644

Author Information

Name Institution
Ryan SheilUniversity of California - Los Angeles (UCLA)
Danielle ButtsUniversity of California - Los Angeles (UCLA)
Katherine JungjohannSandia National Laboratories
Jinkyoung YooLos Alamos National Laboratory
Bruce DunnUniversity of California - Los Angeles (UCLA)
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma MnOx

Hardware used: Custom Microwave Plasma
Mn(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese
CAS#: 14324-99-3
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 205-265C

Thermal Li2O

Hardware used: Custom Microwave Plasma
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 205-265C

Other LiMnO

Hardware used: Custom Microwave Plasma
Mn(TMHD)3, tris(2,2,6,6-tetramethyl-3,5-heptanedionato) manganese
CAS#: 14324-99-3
O2, Oxygen
CAS#: 7782-44-7
LiOt-Bu, LiOtBu, LTB, Lithium tert-butoxide, Lithium tertiary butoxide, LiOC4H9
CAS#: 1907-33-1
H2O, Water
CAS#: 7732-18-5
Deposition Temperature Range = 205-265C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-88

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova NanoSEM 600

Characteristic: Compositional Depth Profiling
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MPD X-ray Diffractometer

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Fastscan/ICON

Characteristic: Electrochemical Performance
Analysis: CV, Cyclic Voltammetry
Diagnostic: Bio-Logic VMP3 multichannel electrochemical workstation

Characteristic: Battery Properties
Analysis: Galvanostatic Cycling
Diagnostic: Bio-Logic VMP3 multichannel electrochemical workstation

Substrates

Si(001)
Pt

Notes

1555