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Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition

Type:
Journal
Info:
Chem. Mater. 2015, 27, 7282-7288
Date:
2015-08-17
DOI:
http://dx.doi.org/10.1021/acs.chemmater.5b02162

Author Information

Name Institution
Calvin D. PhamUniversity of California - Los Angeles (UCLA)
Jeffrey ChangUniversity of California - Los Angeles (UCLA)
Mark A. ZurbuchenUniversity of California - Los Angeles (UCLA)
Jane P. ChangUniversity of California - Los Angeles (UCLA)

Films

Plasma Bi2O3

Hardware used: Custom Microwave Plasma
Bi(TMHD)3, Bi(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) bismuth, Bismuth dipivaloylmethanate
CAS#: 142617-53-6
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Plasma Fe2O3

Hardware used: Custom Microwave Plasma
Fe(TMHD)3, Fe(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) iron, Iron(III) dipivaloylmethanate
CAS#: 14876-47-2
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Plasma BiFeO3

Hardware used: Custom Microwave Plasma
Bi(TMHD)3, Bi(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) bismuth, Bismuth dipivaloylmethanate
CAS#: 142617-53-6
Fe(TMHD)3, Fe(THD)3, tris(2,2,6,6-tetramethyl- 3,5-heptanedionato) iron, Iron(III) dipivaloylmethanate
CAS#: 14876-47-2
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 190-230C

Film/Plasma Properties

Characteristic: Piezoelectric properties
Analysis: PFM Piezo Force Microscopy
Diagnostic: Bruker Dimension ICON

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam M-88

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Bonding States
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: PANalytical Xpert PRO MRD X-ray Diffractometer

Characteristic: Microstructure
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Titan

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction
Diagnostic: FEI Titan

Characteristic: Magnetic Properties
Analysis: SQUID, Superconducting Quantum Interference Device
Diagnostic: Quantum Design MPMS

Substrates

Si(001)
SrTiO3
Nb:SrTiO3

Notes

538