Inductively coupled plasma sources from Plasma ALD, LLC.


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Mark A. Zurbuchen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mark A. Zurbuchen returned 2 record(s).

NumberTitle
1Synthesis and Characterization of BiFeO3 Thin Films for Multiferroic Applications by Radical Enhanced Atomic Layer Deposition
2Magnetic Properties of CoFe2O4 Thin Films Synthesized by Radical-Enhanced Atomic Layer Deposition