Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Marianna Kemell Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Marianna Kemell returned 3 record(s).

NumberTitle
1Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
2Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
3Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor