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Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis

Type:
Journal
Info:
Mater. Adv., 2020, DOI: 10.1039/D0MA00666A
Date:
2020-10-03

Author Information

Name Institution
Jerome W. F. InnocentUniversity of Bath
Mari NapariUniversity of Cambridge
Andrew L. JohnsonUniversity of Bath
Thom R. Harris-LeeUniversity of Bath
Miriam RegueImperial College London
Timo SajavaaraUniversity of Jyväskylä
Judith L. MacManus-DriscollUniversity of Cambridge
Frank MarkenUniversity of Bath
Feras AlkhalilPragmatIC Printing LLC

Films

Plasma NiOx


Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Chemical Composition, Impurities
Analysis: TOF-ERDA, Time-Of-Flight Elastic Recoil Detection Analysis

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Band Gap
Analysis: UV-VIS Spectroscopy

Characteristic: Uniformity
Analysis: SEM, Scanning Electron Microscopy

Substrates

SiO2
TiO2

Notes

1518