Oili M. E. Ylivaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oili M. E. Ylivaara returned 5 record(s).

Number	Title
1	Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
2	Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
3	Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
4	Tribological properties of thin films made by atomic layer deposition sliding against silicon
5	Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition