Oili M. E. Ylivaara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Oili M. E. Ylivaara returned 5 record(s).

NumberTitle
1Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
2Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
3Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
4Tribological properties of thin films made by atomic layer deposition sliding against silicon
5Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition

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