Ville Rontu Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ville Rontu returned 3 record(s).

Number	Title
1	Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support
2	Tribological properties of thin films made by atomic layer deposition sliding against silicon
3	Atomic layer deposition of AlN from AlCl₃ using NH₃ and Ar/NH₃ plasma