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NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s).

NumberTitle
1Plasma-enhanced ALD system for SRF cavity
2Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
3Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
4A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
5RF Characterization of Novel Superconducting Materials and Multilayers
6Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
7Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
8Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
9Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
10Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
11Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
12Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
14Atomic Layer Deposition of Niobium Nitride from Different Precursors
15Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
16Performance of Samples with Novel SRF Materials and Growth Techniques
17Plasma-enhanced atomic layer deposition of superconducting niobium nitride
18Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
19Tribological properties of thin films made by atomic layer deposition sliding against silicon
20Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate