Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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NbN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing NbN films returned 20 record(s).

NumberTitle
1Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
2Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
3Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
4Atomic Layer Deposition of Niobium Nitride from Different Precursors
5Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks
6Performance of Samples with Novel SRF Materials and Growth Techniques
7Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
8Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
9Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
10Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
11Plasma-enhanced atomic layer deposition of superconducting niobium nitride
12Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
13A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
14Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
15RF Characterization of Novel Superconducting Materials and Multilayers
16Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application
17Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
18Tribological properties of thin films made by atomic layer deposition sliding against silicon
19Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
20Plasma-enhanced ALD system for SRF cavity