Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
Type:
Journal
Info:
Superconductor Science and Technology, Volume 30, Number 3
Date:
2019-09-27
Author Information
| Name | Institution |
|---|---|
| Emanuel Knehr | Leibniz Institute of Photonic Technology |
| Artem Kuzmin | Karlsruhe Institute of Technology (KIT) |
| Denis Y Vodolazov | Russian Academy of Sciences |
| Mario Ziegler | Leibniz Institute of Photonic Technology |
| Steffen Doerner | Karlsruhe Institute of Technology (KIT) |
| Konstantin Il'in | Karlsruhe Institute of Technology (KIT) |
| Michael Siegel | Karlsruhe Institute of Technology (KIT) |
| Ronny Stolz | Leibniz Institute of Photonic Technology |
| Heidemarie Schmidt | Leibniz Institute of Photonic Technology |
Films
Plasma NbN
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: Four-point Probe
Characteristic: Critical Temperature
Analysis: -
Characteristic: Superconductivity
Analysis: -
Substrates
| Sapphire |
Notes
| 1374 |