Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Michael Siegel Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael Siegel returned 2 record(s).

NumberTitle
1Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
2Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices