Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 20 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition of superconducting niobium nitride
2Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
3Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
4Performance of Samples with Novel SRF Materials and Growth Techniques
5Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
6A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
7Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
8Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
9Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
10Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
11RF Characterization of Novel Superconducting Materials and Multilayers
12Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
13Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
14In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
15Atomic Layer Deposition of Niobium Nitride from Different Precursors
16Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
17Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
18Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
19RF Characterization of Novel Superconducting Materials and Multilayers
20Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition