Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 20 record(s).

NumberTitle
1Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
2Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
3Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
4Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
5Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
7Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
8Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
9Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
10RF Characterization of Novel Superconducting Materials and Multilayers
11Plasma-enhanced atomic layer deposition of superconducting niobium nitride
12Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
14RF Characterization of Novel Superconducting Materials and Multilayers
15Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
16A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
17Performance of Samples with Novel SRF Materials and Growth Techniques
18In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
19Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
20Atomic Layer Deposition of Niobium Nitride from Different Precursors