Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 20 record(s).

NumberTitle
1RF Characterization of Novel Superconducting Materials and Multilayers
2Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
3Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
4Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
5Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
6Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
7Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
8Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
9Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
10Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
11Plasma-enhanced atomic layer deposition of superconducting niobium nitride
12Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
13Atomic Layer Deposition of Niobium Nitride from Different Precursors
14In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
15Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
16Performance of Samples with Novel SRF Materials and Growth Techniques
17Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate
18A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
19Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
20RF Characterization of Novel Superconducting Materials and Multilayers