Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

TBTDEN, Tris(diethylamido)(tert-butylimido)niobium, CAS# 210363-27-2

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 20 record(s).

NumberTitle
1A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition
2Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
3Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
4Plasma-enhanced atomic layer deposition of superconducting niobium nitride
5RF Characterization of Novel Superconducting Materials and Multilayers
6Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
7In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
8RF Characterization of Novel Superconducting Materials and Multilayers
9Performance of Samples with Novel SRF Materials and Growth Techniques
10Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition
11Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices
12Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
13Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition
14Atomic Layer Deposition of Niobium Nitride from Different Precursors
15Superconducting Characteristics of NbN Films Deposited by Atomic Layer Deposition
16Nanowire single-photon detectors made of atomic layer-deposited niobium nitride
17Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
18Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
19Superconducting nanowire single-photon detectors fabricated from atomic-layer-deposited NbN
20Multistep atomic layer deposition process for ultrathin superconducting NbN films with high critical current density on amorphous substrate