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Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires

Type:
Journal
Info:
Applied Physics Letters 118, 191106 (2021)
Date:
2021-04-30
DOI:
http://dx.doi.org/10.1063/5.0048799

Author Information

Name Institution
Gregor G. TaylorUniversity of Glasgow
Dmitry V. MorozovUniversity of Glasgow
Ciaran T. LennonUniversity of Glasgow
Peter S. BarryArgonne National Laboratory
Calder SheagrenUniversity of Chicago
Robert H. HadfieldUniversity of Glasgow

Films

Plasma NbN

Hardware used: Veeco - Ultratech - Cambridge NanoTech Fiji
TBTDEN, Tris(diethylamido)(tert-butylimido)niobium
CAS#: 210363-27-2
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature = 300C

Film/Plasma Properties

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: -

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai T20

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: FEI Technai T20

Characteristic: Photoresponse
Analysis: SNSPDs, Superconducting nanowire single-photon detectors
Diagnostic: Custom

Substrates

Si(100)

Notes

1695