Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Peter S. Barry Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Peter S. Barry returned 3 record(s).

NumberTitle
1Atomic Layer Deposition Niobium Nitride Films for High-Q Resonators
2Infrared single-photon sensitivity in atomic layer deposited superconducting nanowires
3Atomic layer deposition of titanium nitride for quantum circuits